Eximer Laser for High-Pressure Gas Mixtures CL 7000 for Precision Applications

The CL 7000 series excimer laser is a laser with transverse electric discharge in a high-pressure gas mixture. These lasers are characterised by high stability of average power, high lifetime of the gas mixture, are made in a single module with computer control of all processes of preparation and carrying out of works. The CL 7000 series laser is designed for use both as part of various systems and separately as a source of high-power coherent pulsed-periodic UV radiation.

The CL 7000 laser uses various gas mixtures in which excimer molecules are formed under the influence of discharge: ArF, KrF, or XeCl. Excimer laser with optical table and radiation shaping system for laser sputtering systems. Characteristic features: Tyrathron commutator; Gas mixture - premix; Built-in pulse energy sensor; Output energy stabilisation; Computer control.

Weight170kg. Dimensions (L x W x H): 1430 x 380 x 760 mm.