
Four-Probe Head for Accurate Surface Resistance Measurement (IG-4-300)
Manufacturer:
OSTEK-ELEKTRO LLC
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Description
The contacting head is designed for measuring the surface resistivity of various materials and thin films with a sample temperature of (100 - 300) °C during measurement. The design features allow measurements to be made directly during the growth of coatings on dielectric and semiconductor substrates, without the need to cool the sample to room temperature and evacuate the process equipment.
Additional characteristics:
-construction material: ceramics - vacuum-dense corundum material of mark VK9401, body - beryllium bronze of mark BrB2, copper - of mark MB;
-material of probe needles - tungsten;
-radius of needle point rounding - 150 µm, distance between needle centres - 1,59 mm ± 25 µm.
Additional characteristics:
-construction material: ceramics - vacuum-dense corundum material of mark VK9401, body - beryllium bronze of mark BrB2, copper - of mark MB;
-material of probe needles - tungsten;
-radius of needle point rounding - 150 µm, distance between needle centres - 1,59 mm ± 25 µm.
Specifications
Range of measured surface resistance of film
100kOhm to 300kOhm ohm
Thickness of the coating of the material under test
60nm to 250nm mm
Pressure
9·10-6
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