Integrated Vacuum Trap LI-630 for Efficient Diffusion Pump Applications

Integrated flangeless trap LI-630 is installed inside the diffusion pump instead of the standard oil deflector, without increasing the overall dimensions of the diffusion pump.

LI-630 trap performs the function of an oil deflector, is installed instead of a standard oil deflector in pumps, has an additional number of cooled screens for trapping vapours of oil return flow (more than the MU trap), covers the whole area of the inlet high-vacuum flange.