Available for ImportMulti-Position Vacuum Loading-Unloading Module RLG.E.443295.001 for Efficient Material Handling
Manufacturer:QUANT LLC
Price:Request Quote
Bulk pricing available
FOB, CIF & EXW terms available
Description
Module loading-unloading vacuum multi-position RLGE.443295.001 (VMZVMP) with vacuum locking system, plate moving manipulator inside the module, transport chamber for several positions of technological stations, system of plate moving between technological stations and system of sealing of working volumes of technological stations is designed for installation of hermetic container with semiconductor wafer 100 mm
Specifications
Kinematic throughput (time from fixation of the container to its release at consecutive passage of all the techniques) 241591:Ki
150
Possibility to equip up to five positions of technological stations
Yes; no
Airtight sealing of process station workspace volumes from the internal module volume
Yes; no
Filling the container with gas (nitrogen) to a specified pressure in the range from 0 to 100 Pa to atmospheric pressure when it
0...100
Possibility to pump the gas after opening the container to the set pressure by external means
Yes; no
Opening/closing the container
Yes; no
Securing the container
Yes; no
Container orientation
Yes; no
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Delivery Time
Sea freight: 30-60 days (depending on destination) Air freight: 14-21 days (for urgent orders)
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