
PLU PECVD pilot plant automating the process of
Manufacturer:
NTs TPT LLC
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Description
The unit is designed to automate the process of unloading wafers from cassettes, stacking them in pallets, transferring the pallets to the PECVD reactor, receiving the pallets from the reactor, removing the wafers from the pallets, flipping the wafers, loading them into the cassettes
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Delivery Time
Sea freight: 30-60 days (depending on destination)
Air freight: 14-21 days (for urgent orders)
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