Automatic RF Matching Device SURA-500-50-13 (0.5 kW)

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Automatic RF Matching Device SURA-500-50-13 for Efficient Load Matching

Electrical Interface Devices

Manufacturer:LVT+ LLC

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Bulk pricing available

FOB, CIF & EXW terms available

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Available Models

Coordinating device SURA-3000-50-13 (3 kW)

Description

The automatic radio-frequency coordinating device SURA is designed to ensure coordination of the load with variable impedance, with coaxial cable and high-frequency generator output in manual and automatic modes.

The SURA matching device is equipped with: <ul> <li>- emergency interlocking system</li> <li>Modbus RTU protocol control</li> <li>RS-485 interface</li> </ul> *The device can be supplied in two versions: for inductive and capacitive loads.

Inductive loads - induction gas discharge systems, including radio frequency plasma generators. Capacitive loads - high frequency magnetron sputtering systems, high frequency bias fed tables, high frequency glow discharge cleaning systems.

Operation manual is available on request: LCMK.303.00.00.00.00.000 RE SOURA-3000-50-13 ADJUSTING DEVICE

Specifications

Assignment

Provision of harmonisation of load having variable impedance with coaxial cable and output of high-frequency generator in manual and automatic modes.

Dustproof

Yes - The unit housing is made of metal and has no exposed live parts.

Type of construction

Stationary

Warranty period

1 year

Climatic designs

GOST 15150-69; GOST 15543-70 at normal values of climatic factors of the environment - UHL for product placement category 4.2

Power supply voltage

230 ±10% V

Maximum power

0,5 kW

Minimum RF power

100 W

Operating frequency

13,56

Input impedance

SBVVBG ohm

Maximum output current amplitude

75 A

Maximum voltage amplitude

5 kV

Maximum load reactance

150

Interface

RS-485

Data transfer protocol

ModBus RTU

Overall dimensions, (length x width x height)

313x277x172 mm

Weight, not more

7 kg

Note: All specifications are provided by the manufacturer and may be subject to change. Please contact us to confirm the latest specifications before placing your order.

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Shipping Terms

FOB Novorossiysk, RussiaCIF Available to major ports worldwideEXW Manufacturer's facility, Russia

Delivery Time

Sea freight: 30-60 days (depending on destination) Air freight: 14-21 days (for urgent orders)

Payment Methods

Letter of Credit (L/C)Wire Transfer (T/T)Escrow Services

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Automatic RF Matching Device SURA-500-50-13 for Efficient Load Matching

Available Models

Description

Specifications

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