
Coordinating device SURA-3000-50-13 3 kW
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FOB, CIF & EXW terms available
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Description
The automatic radio-frequency coordinating device SURA is designed to ensure coordination of the load with variable impedance with coaxial cable and output of high-frequency generator in manual and automatic modes.
The SURA matching device is equipped with:
- - emergency interlocking system
- Modbus RTU protocol control
- RS-485 interface
Inductive loads - induction gas discharge systems, including radio frequency plasma generators. Capacitive loads - high frequency magnetron sputtering systems, high frequency bias fed tables, high frequency glow discharge cleaning systems.
Operational Manual is available on request: LCMK.303.00.00.00.00.000 RE SOURA-3000-50-13 AGREGATING DEVICE. To order, standard modernisation of the device by the manufacturer is possible.Specifications
Note: All specifications are provided by the manufacturer and may be subject to change. Please contact us to confirm the latest specifications before placing your order.
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