Excimer Laser CLS 5000 - High-Pressure Gas Discharge Technology for Precision Applications

The CLS 5000 series excimer laser is a laser with transverse electric discharge in a high-pressure gas mixture (with HV semiconductor switch). These lasers are characterised by compactness, high stability of average power, high lifetime of gas mixture, are made in a single module with computer control of all preparation and work processes. The CLS 5000 series laser is designed for use both as a part of various installations and separately as a source of powerful coherent pulsed-periodic UV radiation.

Characteristic features of the laser: High spatial stability of the laser beam High angular stability of the laser beam. High pulse repetition rate. Solid-state commutator.

Compact excimer laser. Built-in oil-free vacuum pump and gas filter. Integrated pulse energy sensor.

Output energy stabilisation.