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Multi-layer Structure Physical Vapor Deposition System Feba 4MI-100-G for Advanced Coating Applications
Manufacturer:
QUANT LLC
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Description
The unit for physical deposition of multilayer structures ??GE.443255.501 (commercial name "Feba 4MI-100-G") is designed for deposition in one vacuum cycle of multilayer structures including adhesive, barrier, conductive, insulating layers of nitrides, oxides, metals and semiconductors, using magnetron sputtering methods (DC, RF, HiPIMS).
Specifications
Introduced defectivity, not more
Particles larger than 0,3 µm, not more than 0,1 pcs./cm2
Kinematic productivity (conditional process 40 s/chamber)
30 plates/hour
Unevenness of layer application by thickness, not more
2 %
Unevenness of temperature on the table, not more than
1.5 °C
Accuracy of temperature maintenance during degassing and material application, not worse than
0.5 °C
Maximum heating temperature during degassing and material application, not less than
350 °C
Possibility of degassing, heating, ion-plasma cleaning before applying layers
Yes; no
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Delivery Time
Sea freight: 30-60 days (depending on destination)
Air freight: 14-21 days (for urgent orders)
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