
Vacuum Loading-Unloading Module Single Position RLG.E.443299.001 for Container Handling
Manufacturer:
QUANT LLC
Price:
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Description
Vacuum single-position loading-unloading module RLGE.443299.001 (VMPZV) with vacuum airlocking system with plate moving manipulator inside the module is designed for installation of hermetic container with semiconductor wafer 100 mm
Specifications
Kinematic throughput (time from container clamping to release)
70
Filling the container with gas (nitrogen) up to the preset pressure in the range from 0 to 100 Pa to atmospheric pressure when i
0...100
Possibility to pump the gas after opening the container to the set pressure by external means
Yes; no
Opening/closing the container
Yes; no
Locking the container at the port of loading/unloading
Yes; no
Container orientation at the port of loading/unloading
Yes; no
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Shipping Terms
Delivery Time
Sea freight: 30-60 days (depending on destination)
Air freight: 14-21 days (for urgent orders)
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